CAJ | 학술논문

等离子体轰击聚酰亚胺表面会提高挠性印制电路板中溅射铜膜与聚酰亚胺基板的附着力,同时聚酰亚胺表面亲水性随之改变.本文通过改变轰击等离子体种类、轰击电流、轰击时间和轰击气压等条件,研究这些工艺参数与聚酰亚胺表面亲水性的相互关系.在等离子体轰击处理后的聚酰亚胺上磁控溅射镀铜并电镀加厚,利用剥离强度测试仪测量铜膜与聚酰亚胺基板的附着力,并分析亲水性与附着力之间的关系.研究发现,等离子体轰击可以增强聚酰亚胺的亲水性及聚酰亚胺基板与铜膜的附着力,且亲水性越好的样品,溅射镀铜后铜膜与基板的附着力也越好,并得到了等离子体轰击参数与亲水性的关系;研究表明可以把测量亲水性作为聚酰亚胺表面等离子体轰击效果的一种评价方法.
등리자체굉격취선아알표면회제고뇨성인제전로판중천사동막여취선아알기판적부착력,동시취선아알표면친수성수지개변.본문통과개변굉격등리자체충류、굉격전류、굉격시간화굉격기압등조건,연구저사공예삼수여취선아알표면친수성적상호관계.재등리자체굉격처리후적취선아알상자공천사도동병전도가후,이용박리강도측시의측량동막여취선아알기판적부착력,병분석친수성여부착력지간적관계.연구발현,등리자체굉격가이증강취선아알적친수성급취선아알기판여동막적부착력,차친수성월호적양품,천사도동후동막여기판적부착력야월호,병득도료등리자체굉격삼수여친수성적관계;연구표명가이파측량친수성작위취선아알표면등리자체굉격효과적일충평개방법.
A novel technique was developed to improve the hydrophilicity of polyimide surface and to enhance its interfacial adhesion to Cu film.In the technique,polyimide surfaces were modified by plasma bombardment.The impacts of the surface modification conditions,including type of plasma,bombardment current,time and pressure,on its hydrophilicity were sludied.In addition,the Cu films were deposited on the surface modified polyimide substrate.The results show that plasma surface modification significantly improves its hydrophilicity and its interfacial adhesion.Interesting finding is that the higher the hydrophilicity,the stronger the interfacial adhesion.We suggest that a judicious choiec of plasma surface modification conditions may lead to an optimized hydrophilicity.