集成悬臂梁/探针阵列在PMMA薄膜上微纳摩擦的尺寸和温度效应
집성현비량/탐침진렬재PMMA박막상미납마찰적척촌화온도효응
Tip size-effect and temperature-effect on PMMA film friction by using an integrated MEMS probe array
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