CAJ | 학술논문

采用磁过滤阴极真空孤沉积技术对从孤源引出离子束中的大颗粒进行过滤后，在硅和聚合物表面进行离子注入和低能离子束沉积，可获得特性优异的沉积金属膜、超硬膜(类金刚石，CN膜)、陶瓷膜(TiN，TiC)等。电子显微镜观察表明，大颗粒已被过滤，表面结构致密。由于先进行离子注入，在基体表面预先形成了过渡层，从而改善了沉积膜的粘合特性，膜与基体的粘合特性有了明显提高。测量结果表明，沉积膜的硬度、抗磨损和抗腐蚀特性均有了明显提高。非晶金刚石薄膜表面硬度可达到56GPa.
채용자과려음겁진공고침적기술대종고원인출리자속중적대과립진행과려후，재규화취합물표면진행리자주입화저능리자속침적，가획득특성우이적침적금속막、초경막(류금강석，CN막)、도자막(TiN，TiC)등。전자현미경관찰표명，대과립이피과려，표면결구치밀。유우선진행리자주입，재기체표면예선형성료과도층，종이개선료침적막적점합특성，막여기체적점합특성유료명현제고。측량결과표명，침적막적경도、항마손화항부식특성균유료명현제고。비정금강석박막표면경도가체도56GPa.
The compact thin films on silicon and polymer were implanted bymetal Vacuum vapor are (MEVVA) ion implantorl and deposited by magnetic Filter Cathode Vacuum Arc Deosition, The advanced metal, super- hardening (DLC and CN film) and ceramic(Tic, Tin et al)films were obtained. The observations by SEM show that the clusters were filtered using the magnetic filter. The compact film was obtained. The transition layer was formed under the film due to pre-implantation. So that the adhesion of the film to the subtract obviously enhanced. The results show that the mechanical and chemical properties (such as hardness, abrasion resistance and corrosion resistarce)were extremely improved The hardness of diamond-like amorphous carbon(DLC)film is about 56GPa.