CAJ | 학술논문

成功研制了GaAs基MOEMS可调谐RCE光探测器.该器件采用单悬臂梁结构,在6V的小调谐电压下,获得了31nm的连续调谐范围.在调谐过程中,峰值量子效率最大为36.9%,最小为30.8%;FWHM最大为20nm,最小为14nm.在0V偏压下器件的暗电流密度为7.46A/m2.
성공연제료GaAs기MOEMS가조해RCE광탐측기.해기건채용단현비량결구,재6V적소조해전압하,획득료31nm적련속조해범위.재조해과정중,봉치양자효솔최대위36.9%,최소위30.8%;FWHM최대위20nm,최소위14nm.재0V편압하기건적암전류밀도위7.46A/m2.
A GaAs-based micro-opto-electro-mech anical-systems(MOEMS) tunable resonant cavity enhanced(RCE)photodetector with a continuous tuning range of 31nm under a 6V tuning voltage is demonstrated. The single cantilever beam structure is adopted for this MOEMS tunable RCE photodetector. The maximum and minimum peak quantum efficiency during the tuning are 36.9 % and 30. 8 %, respectively. The maximum and minimum full-width-at-halfmaximum (FWHM) are 20nm and 14nm,respectively. The dark current density is 7.46A/m2 without bias.