CAJ | 학술논문

为了获得风速风向的信息,制作了一种拖动力式微型固态测风传感器.它包括两个正交封装的单元,每个单元用来独立地测量风速,含有一个薄平板和两个用来连接平板和硅衬底的短悬梁.由于当风从不同角度吹过传感器时悬梁上的应变不同,因此通过测量单个单元悬梁上的应变值可获得风速值,同时通过正交组装两个测风速单元获得风向值.该传感器在ANSYS软件中进行了模拟,用流体力学进行了分析,并在小型风洞中进行了测试.结果表明在输入电源电压为0.5 V时传感器最大灵敏度高迭60 μV/(m·8-1),风向测量的线性度小于6%.
위료획득풍속풍향적신식,제작료일충타동력식미형고태측풍전감기.타포괄량개정교봉장적단원,매개단원용래독입지측량풍속,함유일개박평판화량개용래련접평판화규츤저적단현량.유우당풍종불동각도취과전감기시현량상적응변불동,인차통과측량단개단원현량상적응변치가획득풍속치,동시통과정교조장량개측풍속단원획득풍향치.해전감기재ANSYS연건중진행료모의,용류체역학진행료분석,병재소형풍동중진행료측시.결과표명재수입전원전압위0.5 V시전감기최대령민도고질60 μV/(m·8-1),풍향측량적선성도소우6%.
In order to obtain the information of wind velocity and direction, a drag force micro solid state wind sensor was presented in this paper. It includes two perpendicularly encapsulating cells, each of which is used to measure the wind velocity and has a thin silicon plate and two short cantilevers which connect with the plate and silicon substrate. The strain of the cantilevers is different when wind blows to the plate from different angles. The wind velocity can be obtained by measuring the strain of cantilevers, and the wind direction can be measured by perpendicularly encapsulating the two cells. Furthermore, the single cell and whole sensor were simulated with ANSYS software, analyzed with fluid mechanics principle and tested in small wind tunnel. It is shown that the single cell is capable of high sensitivity 60 μV/ (m·s-1) when the input voltage is 0. 5 V, and the linearity of wind direction measurement is less than 6% .