CAJ | 학술논문

为了研究测试频率对传感器性能的影响,改善多壁碳纳米管(multi-walled carbon nanotubes,MWCNTs)湿度传感器检测方法并提高传感器检测精度,时传感器频率特性进行了分析.在玻璃衬底上利用蒸镀和光刻技术制作了叉指电极,在电极表面涂敷了MWCNTS-SiO2敏感薄膜,最后通过烧结完成传感器制作.利用饱和盐溶液法产生相应湿度值,并使用RCL自动测试仪对传感器进行测试,测试频率选择在1 kHz到500 kHz之间.对传感器频率特性进行了实验与理论分析,结果表明,该传感器电容值时环境湿度敏感,并且其敏感特性受传感器检测频率的影响.使用毛细凝聚理论以及电解质物理理论对上述实验现象进行了合理的解释.传感器静态电容以及对湿度的灵敏度均随着测试频率的增加明显降低,测试频率为500 kHz时传感器灵敏度仅为测试频率1 kHz时的0.24倍.
위료연구측시빈솔대전감기성능적영향,개선다벽탄납미관(multi-walled carbon nanotubes,MWCNTs)습도전감기검측방법병제고전감기검측정도,시전감기빈솔특성진행료분석.재파리츤저상이용증도화광각기술제작료차지전겁,재전겁표면도부료MWCNTS-SiO2민감박막,최후통과소결완성전감기제작.이용포화염용액법산생상응습도치,병사용RCL자동측시의대전감기진행측시,측시빈솔선택재1 kHz도500 kHz지간.대전감기빈솔특성진행료실험여이론분석,결과표명,해전감기전용치시배경습도민감,병차기민감특성수전감기검측빈솔적영향.사용모세응취이론이급전해질물리이론대상술실험현상진행료합리적해석.전감기정태전용이급대습도적령민도균수착측시빈솔적증가명현강저,측시빈솔위500 kHz시전감기령민도부위측시빈솔1 kHz시적0.24배.
To study the effect of the testing frequencies on sensor properties, and to improve the measuring method and the properties of the multi-walled carbon nanotubes (MWCNTs) humidity sensor, the frequency properties of the sensor were studied. Interdigital electrodes were made on the glass substrate by evaporation and photolithography, then a layer of MWCNTs-SiO2 mixture was coated on the electrodes, at last the sensor was nodulized in vacuum circumstance. The controlled relative humidity (RH) environments were achieved using saturated saline solutions, and the sensor was tested by automatic RCL meter at the testing frequencies from 1 kHz to 500 kHz. The frequency characteristics of the sensor were studied by both experimental and theoretical analysis. Results show that the sensor capacitance is sensitive to the RH and the sensing properties are based on the testing frequencies. Moreover, the testing frequency has a strong influence on capacitance properties of the sensor and those phenomena are explained qualitatively using the theory of capillary condensation and dielectric physics. Both the static capacitance and the sensitivity to RH decrease along with the increase of testing frequencies. The capacitance sensitivity at testing frequency of 500 kHz is 0. 24 times of that at testing frequency of 1 kHz.