CAJ | 학술논문

通过测量压电悬臂梁的等效电容来检测悬臂梁的振动信息,以应用于基于扫描探针技术的高密度信息存储中进行数据读取.在压电悬臂梁的PZT压电层上施加交流电场使其工作在共振状态,并使其自由端与存储介质进行周期性的接触.当悬臂梁的自由端扫描到数据点时,其自由端的振幅和所受到的外力将发生变化,进而引起PZT压电层的介电常数发生变化.因此,通过检测悬臂梁上压电层的等效电容变化,便可以得到悬臂梁的振幅改变量,从而实现了对存储介质上数据的读取.实验结果表明,该可以实现1nm的位移检测分辨率.
통과측량압전현비량적등효전용래검측현비량적진동신식,이응용우기우소묘탐침기술적고밀도신식존저중진행수거독취.재압전현비량적PZT압전층상시가교류전장사기공작재공진상태,병사기자유단여존저개질진행주기성적접촉.당현비량적자유단소묘도수거점시,기자유단적진폭화소수도적외력장발생변화,진이인기PZT압전층적개전상수발생변화.인차,통과검측현비량상압전층적등효전용변화,편가이득도현비량적진폭개변량,종이실현료대존저개질상수거적독취.실험결과표명,해가이실현1nm적위이검측분변솔.
A novel data readout method based on equivalent capacitance detection is developed for SPM-based high density data storage. A self-excited vibrating piezoelectric cantilever is used for data readout at its resonant frequency by cyclic contact mode. When the cantilever tip scans over the data bits, an additional external stress on the PZT layer induced by tip deflection leads to the changes of the dielectric constant as well as the capacitance of the cantilever. The experimental results indicated that the capacitance detection method has a displacement resolution of about 1 nm.