CAJ | 학술논문

提出一种广泛使用的C02激光法,以直接读写烧蚀的方式,进行快速的聚甲基丙烯酸甲酯(PMMA)基材的微流控分析芯片的制造.利用此方法所制造的微流道,将以扫描电子显微镜(SEM)、原子力显微镜(AFM)及表面轮廓仪进行各项表面性质的分析.本文所发展的CO2激光烧蚀法,提供了一个可广泛使用及具有经济效应的PMMA基材的微流控分析芯片的制造方法.在此激光制程法中,微流控分析芯片的制造图案可由商业的套装软件绘制而成,再传输至激光系统中进行烧蚀微管道,结果显示利用离焦法的激光制程技术,在没有退火处理的情况下.就可以获得表面相当平滑的微流道,表面粗糙度小于4 nm.
제출일충엄범사용적C02격광법,이직접독사소식적방식,진행쾌속적취갑기병희산갑지(PMMA)기재적미류공분석심편적제조.이용차방법소제조적미류도,장이소묘전자현미경(SEM)、원자력현미경(AFM)급표면륜곽의진행각항표면성질적분석.본문소발전적CO2격광소식법,제공료일개가엄범사용급구유경제효응적PMMA기재적미류공분석심편적제조방법.재차격광제정법중,미류공분석심편적제조도안가유상업적투장연건회제이성,재전수지격광계통중진행소식미관도,결과현시이용리초법적격광제정기술,재몰유퇴화처리적정황하.취가이획득표면상당평활적미류도,표면조조도소우4 nm.
This paper presents a widely available C02 laser scriber to perform the direct-writing ablation of poly (methyl methacrylate) (PMMA) substrate for the development of microfluidic chips. The surface quality of the ablated microchannels and the presence of debris and distortion were examined by scanning electron microscopy, atomic force microscopy and surface profile measurement techniques. The developed laser ablation system provides a versatile and economic approach for the fabrication of microfluidic chips on PMMA substrate. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches: The results show that a very smooth channel wall with surface roughness less than 4 nm can be achieved through the unfocusing fabrication method without any annealing process. The machining capability and versatility of the laser writing system are demonstrated through its application to the microfluidic chips fabrication on PMMA substrate.