CAJ | 학술논문

我们使用薄膜沉积法制作16阶菲涅耳透镜，其衍射效率接近87%.用它代替常规的光学透镜可实现系统的轻量化、小型化、增加系统设计的自由度.在标量衍射理论的基础上，应用菲涅耳公式和傅里叶变换分析SiO2薄膜和基底的表面反射、对准误差以及入射角对16阶菲涅耳透镜衍射效率的影响.
아문사용박막침적법제작16계비열이투경，기연사효솔접근87%.용타대체상규적광학투경가실현계통적경양화、소형화、증가계통설계적자유도.재표량연사이론적기출상，응용비열이공식화부리협변환분석SiO2박막화기저적표면반사、대준오차이급입사각대16계비열이투경연사효솔적영향.
The thin film deposition has been used to fabricate 16-step Fresnel lens.Its diffractiveefficiency is approximately 87%.Instead of conventional optical elements,it can perform system′s lightweight,miniaturization and increase degree of freedom in the design.Based on the scalar theory,Fresnel formula and Fourier transform are used to analyze the effects of the surface reflection of SiO2 thin film and substrate,the alignment errors and the angle of incidence of light beam on the diffractive efficiency of 16-step Fresnel lens.