激光杂志
激光雜誌
격광잡지
LASER JOURNAL
2010年
1期
32-33
,共2页
准分子%控制%配气%PIC
準分子%控製%配氣%PIC
준분자%공제%배기%PIC
excimer%control%gas charging%PIC
介绍了一个用于准分子激光器自动充排气的系统,它由单片机控制的组合电磁阀门构成.文章阐明了系统、机械、电气和软件的结构.在KrF准分子激光器上实现了重复精度较好的自动配气.整体结构紧凑、性能稳定,简化了充配气操作,还可以用它实现自动微调激光气体成分,达到延长工作气体寿命的目的.
介紹瞭一箇用于準分子激光器自動充排氣的繫統,它由單片機控製的組閤電磁閥門構成.文章闡明瞭繫統、機械、電氣和軟件的結構.在KrF準分子激光器上實現瞭重複精度較好的自動配氣.整體結構緊湊、性能穩定,簡化瞭充配氣操作,還可以用它實現自動微調激光氣體成分,達到延長工作氣體壽命的目的.
개소료일개용우준분자격광기자동충배기적계통,타유단편궤공제적조합전자벌문구성.문장천명료계통、궤계、전기화연건적결구.재KrF준분자격광기상실현료중복정도교호적자동배기.정체결구긴주、성능은정,간화료충배기조작,환가이용타실현자동미조격광기체성분,체도연장공작기체수명적목적.
A new Excimer Gas Charging System based on a new complex valve and controlled by MCU was introduced, together with the principle of the system, structure of the complex valve and the flow diagram of controlling method. Tested on the 248nm KrF excimer, the auto excimer gas charging with high precision and high repeat precision was realized. Composed of hardware and softvare, the system was designed simply and reliably and also it could be controlled conveniently. It is the base of the Excimer Controlling System.
