CAJ | 학술논문

给出了采用光栅刻划和镀膜技术相结合研制光盘分束光栅的方法.采用光栅刻划机在金属膜上刻制占宽比为0.5的黑白光栅,并由黑白光栅翻制出制作光盘分束光栅的掩模版.通过掩模版对涂覆在K9玻璃基底上的光刻胶实施曝光和显影形成光刻胶矩形浮雕光栅,在理论设计的误差允许范围内,对此浮雕光栅沉积SiO2薄膜,去除残余光刻胶后得到SiO2矩形光栅母版,再经复制工艺制作了环氧树脂光盘分束光栅.测试结果表明,利用光盘分束光栅的纵向和横向加工误差的互补性,可以将光栅辅助光束与读写主光束强度之比的误差控制在±0.03之内.
급출료채용광책각화화도막기술상결합연제광반분속광책적방법.채용광책각화궤재금속막상각제점관비위0.5적흑백광책,병유흑백광책번제출제작광반분속광책적엄모판.통과엄모판대도복재K9파리기저상적광각효실시폭광화현영형성광각효구형부조광책,재이론설계적오차윤허범위내,대차부조광책침적SiO2박막,거제잔여광각효후득도SiO2구형광책모판,재경복제공예제작료배양수지광반분속광책.측시결과표명,이용광반분속광책적종향화횡향가공오차적호보성,가이장광책보조광속여독사주광속강도지비적오차공제재±0.03지내.
A manufacturing method for a light splitting grating based on precision ruling and thin film deposition technologies was presented. The black-white grating with a duty cycle of 0.5 was ruled by a ruling machine on the metal film, then,it was fabricated into a mask for the light splitting grating. After exposuring and developing photoresist on the K9 glass behind the mask, the rectangle relief grating consisting of photoresists was formed. In the range of theory design error, a SiO2 rectangle grating master could be obtained a after SiO2 film was deposited on the relief grating and the rest photoresists were removed.Finally,an epoxide resin light splitting grating was duplicated successfully. The experimental results show that the error of the intensity ratio of secondary light beam to read-write main light beam can be controlled in ±0.03 by using the complementarity of the mismatching tolerance between lengthwise direction and cross direction of the light splitting grating.