纳米技术与精密工程
納米技術與精密工程
납미기술여정밀공정
NANOTECHNOLOGY AND PRECISION ENGINEERING
2011年
3期
221-227
,共7页
彭玉鑫%高伟%金子純史%荒井義和%清水裕樹%冈本幸一%千叶美帆%相泽周二
彭玉鑫%高偉%金子純史%荒井義和%清水裕樹%岡本倖一%韆葉美帆%相澤週二
팽옥흠%고위%금자순사%황정의화%청수유수%강본행일%천협미범%상택주이
直线微工作台%平滑冲击驱动%压电元件%磁铁%精密定位%大行程
直線微工作檯%平滑遲擊驅動%壓電元件%磁鐵%精密定位%大行程
직선미공작태%평활충격구동%압전원건%자철%정밀정위%대행정
linear micro-stage%impact friction drive%piezoelectric element (PZT)%magnet%precision positioning%long stroke
提出了一种基于平滑冲击驱动原理的精密定位直线微工作台.通过采用微小强磁铁作为摩擦元件,减小了由摩擦元件磨损而产生的摩擦力的变化,从而提高了微工作台的稳定性.设计制作了微工作台样机,并对精密定位工作台的动态特性和静态特性进行了实验研究.结果表明,微工作台体积小(20mm×10 mm×3 mm),可实现6 nm的精确定位,最高驱动速度可达5.4 mm/s,最大行程可达20 mm.
提齣瞭一種基于平滑遲擊驅動原理的精密定位直線微工作檯.通過採用微小彊磁鐵作為摩抆元件,減小瞭由摩抆元件磨損而產生的摩抆力的變化,從而提高瞭微工作檯的穩定性.設計製作瞭微工作檯樣機,併對精密定位工作檯的動態特性和靜態特性進行瞭實驗研究.結果錶明,微工作檯體積小(20mm×10 mm×3 mm),可實現6 nm的精確定位,最高驅動速度可達5.4 mm/s,最大行程可達20 mm.
제출료일충기우평활충격구동원리적정밀정위직선미공작태.통과채용미소강자철작위마찰원건,감소료유마찰원건마손이산생적마찰력적변화,종이제고료미공작태적은정성.설계제작료미공작태양궤,병대정밀정위공작태적동태특성화정태특성진행료실험연구.결과표명,미공작태체적소(20mm×10 mm×3 mm),가실현6 nm적정학정위,최고구동속도가체5.4 mm/s,최대행정가체20 mm.
In this paper, a linear micro-stage with a long stroke was presented based on the principle of impact friction drive for precision positioning of micro-objects. By employing small and strong magnets as friction elements, the influence of changes in frictional force due to wear of friction elements can be reduced, which improves the stability of the stage. A prototype stage was designed and constructed, and experiments were carried out to test the basic performance of the stage. It has been verified that, with a compact size of 20 mm × 10 mm ×3 mm, the stage can achieve a resolution of 6 nm, a maximum driving speed of 5.4 mm/s, and a total displacement of 20 mm.
