金属学报(英文版)
金屬學報(英文版)
금속학보(영문판)
ACTA METALLURGICA SINICA
2004年
3期
283-287
,共5页
micro-layer composite material%EBPVD%residual gas pressure%evaporation method and speed%substrate temperature
This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates.
