CAJ | 학술논문

制备了一种全部以聚合物为波导材料的电光调制器，其中芯层为新型可交联极化聚胺脂电光功能材料．旋涂制备波导薄膜、电晕极化产生非线性、光刻和氧反应离子刻蚀完成脊波导为主要的工艺步骤。1.3μm光源光纤耦合输入脊波导调制器，得到很好的输出端单模近场图及清晰的低频调制信号．
제비료일충전부이취합물위파도재료적전광조제기，기중심층위신형가교련겁화취알지전광공능재료．선도제비파도박막、전훈겁화산생비선성、광각화양반응리자각식완성척파도위주요적공예보취。1.3μm광원광섬우합수입척파도조제기，득도흔호적수출단단모근장도급청석적저빈조제신호．
A polymer electro-optic modulator has been fabricated with thefunctional layer acting as a kind of corona poled crosslinkable polyurethane. The three optical layers, namely waveguide, photolithography and oxygen are fabricated by spin coating. With the Reactive Ion Etching method, the ridge of the waveguide is constructed. With light at 1.31μm being fiber coupled to waveguide, the mode and the modulation properties of these devices are demonstrated in a micron control system.