仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2009年
z1期
150-152
,共3页
微双桥%Al_2O_3膜%催化%氢气传感器
微雙橋%Al_2O_3膜%催化%氫氣傳感器
미쌍교%Al_2O_3막%최화%경기전감기
micro-double-bridge%Al_2O_3 membrane%catalyze%H_2 gas sensor
基于催化燃烧式气体传感原理,提出了利用MEMS技术将电化学生长的Al_2O_3膜加工成微双桥结构载体,采用平面薄膜工艺制做铂薄膜热敏电阻,涂敷Al_2O_3-ZrO-Th0-Pd和Al_2O_3-ZrO-Th0形成催化敏感桥臂和温湿度补偿桥臂,实现在微双桥上催化桥臂和补偿桥臂的单片集成,制作出氢气传感器.测试结果表明:传感器可实现体积分数0～40 000×10~(-6)氢气检测,具有线性输出特性,温度为5～45 ℃的传感器的最大零点输出优于±1.0%.
基于催化燃燒式氣體傳感原理,提齣瞭利用MEMS技術將電化學生長的Al_2O_3膜加工成微雙橋結構載體,採用平麵薄膜工藝製做鉑薄膜熱敏電阻,塗敷Al_2O_3-ZrO-Th0-Pd和Al_2O_3-ZrO-Th0形成催化敏感橋臂和溫濕度補償橋臂,實現在微雙橋上催化橋臂和補償橋臂的單片集成,製作齣氫氣傳感器.測試結果錶明:傳感器可實現體積分數0～40 000×10~(-6)氫氣檢測,具有線性輸齣特性,溫度為5～45 ℃的傳感器的最大零點輸齣優于±1.0%.
기우최화연소식기체전감원리,제출료이용MEMS기술장전화학생장적Al_2O_3막가공성미쌍교결구재체,채용평면박막공예제주박박막열민전조,도부Al_2O_3-ZrO-Th0-Pd화Al_2O_3-ZrO-Th0형성최화민감교비화온습도보상교비,실현재미쌍교상최화교비화보상교비적단편집성,제작출경기전감기.측시결과표명:전감기가실현체적분수0～40 000×10~(-6)경기검측,구유선성수출특성,온도위5～45 ℃적전감기적최대영점수출우우±1.0%.
The sensor is based on catalyzed combustion gas-sensitive principle. The Al_2O_3 membrane which was grown by electrochemistry has been processed into micro-double-bridge structure carrier. The platinum membrane heat-sensitive resistance was made by planar technology. Al_2O_3-ZrO-Th0-Pd and Al_2O_3-ZrO-Th0 were spread to form catalyzed-sensitive arm and temperature and humidity compensation arm which realized catalyzed-sensitive arm and temperature and humidity compensation arm on micro-double-bridge integrated on one chip. Thus, the H2 gas sensor was made. The testing result indicate that this sensor can realize bulk fraction 0～40 000×10~(-6) gas detection. It has linear-output characteristic. The maximum zero-output of the sensor is less than ±1.0%,during temperature range 5～45 ℃.
