条形射频源大口径离子束刻蚀机性能
조형사빈원대구경리자속각식궤성능
Characteristics of a large-scale ion beam etcher based on radio frequency linear source
  • 万方数据
    中国科学技术大学学报 중국과학기술대학학보
    JOURNAL OF UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
    2007年 4期 530-535 ,共6页

    董晓浩%刘颖%赵飞云%徐德权%徐向东%周银贵%汪啸%姚传荣%洪义麟%付绍军%徐朝银

    동효호%류영%조비운%서덕권%서향동%주은귀%왕소%요전영%홍의린%부소군%서조은

    离子束刻蚀机%条形射频离子源%束流密度均匀性%束阑%大口径衍射光学元件 離子束刻蝕機%條形射頻離子源%束流密度均勻性%束闌%大口徑衍射光學元件
    리자속각식궤%조형사빈리자원%속류밀도균균성%속란%대구경연사광학원건
    ion bean etcher%radio frequency linear ion beam source%beam current density uniformity%beam diaphragm%large aperture diffraction optical elements
    针对大尺寸基底往复扫描条形离子束来实现大面积刻蚀的特点,实验测试了基于射频感应耦合等离子体离子源大型离子束刻蚀机的性能.利用法拉第筒扫描探测系统在线测量束流密度,通过控制气体流量、调节加速电压等,得到了纵向束流密度±5.3%均匀性的较好结果.刻蚀实验表明40 cm长度范围刻蚀深度均匀性为±5.4%,同时具有较好的束流稳定性.添加束阑,并结合掩模修正束流,会得到更好的束流密度与刻蚀深度均匀性.
    침대대척촌기저왕복소묘조형리자속래실현대면적각식적특점,실험측시료기우사빈감응우합등리자체리자원대형리자속각식궤적성능.이용법랍제통소묘탐측계통재선측량속류밀도,통과공제기체류량、조절가속전압등,득도료종향속류밀도±5.3%균균성적교호결과.각식실험표명40 cm장도범위각식심도균균성위±5.4%,동시구유교호적속류은정성.첨가속란,병결합엄모수정속류,회득도경호적속류밀도여각식심도균균성.
    The characteristics of a large scale ion beam etcher with a radio frequency linear source were described. With a 6 cm × 66 cm rectangular beam which the substrate carriage traverses back and forth, an area as large as 40 cm×40 cm can be covered. According to the illustration of the operating principle, construction features of the etcher, commissioning results and technical performance were presented. Measurements with a scanning Faraday-cup based on current probe were used to optimize the ion beam spatial uniformity. A ±5.3% uniformity of current density along the major axis of the ion source was achieved. Etching experiments show a good uniformity of ±5.4% of etching depth over the 40 cm. The uniformity can be improved combined with beam revising by beam diaphragm and correction mask. Through the measurement of beam current stability, performance of the system was also taken into account.
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