电子工业专用设备
電子工業專用設備
전자공업전용설비
EQUIPMENT FOR ELECTRONIC PRODUCTS MANUFACTURING
2009年
7期
36-37,45
,共3页
FIB%微细加工%微分析%扫描%显像
FIB%微細加工%微分析%掃描%顯像
FIB%미세가공%미분석%소묘%현상
FIB%Micromachining%Microanalysis%Scanning%Imaging
聚焦离子束(FIB)是一种将微分析和微加工相结合的新技术,广泛应用于芯片电路修改、研磨、沉积和二次电子离子成像.扫描显像技术是FIB的重要功能,主要用于器件精密加工中,校正束与工件的坐标位置,修正像的畸变.还可以在显示器上观察加工工件的表面形貌,使加工更加直观.FIB其它所有的功能和应用都要在扫描离子显微镜所显示的图像下进行,叙述了用于FIB扫描显像的一种新方法.
聚焦離子束(FIB)是一種將微分析和微加工相結閤的新技術,廣汎應用于芯片電路脩改、研磨、沉積和二次電子離子成像.掃描顯像技術是FIB的重要功能,主要用于器件精密加工中,校正束與工件的坐標位置,脩正像的畸變.還可以在顯示器上觀察加工工件的錶麵形貌,使加工更加直觀.FIB其它所有的功能和應用都要在掃描離子顯微鏡所顯示的圖像下進行,敘述瞭用于FIB掃描顯像的一種新方法.
취초리자속(FIB)시일충장미분석화미가공상결합적신기술,엄범응용우심편전로수개、연마、침적화이차전자리자성상.소묘현상기술시FIB적중요공능,주요용우기건정밀가공중,교정속여공건적좌표위치,수정상적기변.환가이재현시기상관찰가공공건적표면형모,사가공경가직관.FIB기타소유적공능화응용도요재소묘리자현미경소현시적도상하진행,서술료용우FIB소묘현상적일충신방법.
Focus Ion Beam (FIB) is a kind of new technology which has combined microanalysis and micromachining, and widely used in modification, grinding, disposition and secondary electronic ion imaging of IC circuit. Scan imaging is the key function of FIB, which mainly used in precision machin-ing of devices and image distortion correction. The image of the workpiece can be observed on display, which makes the machining process more directly. All the functions and applications of FIB should be carried out under the image of scanning ion microscope, and a new method of FIB scan imaging is in-troduced in this paper.
