CAJ | 학술논문

针对长导轨直线度传统测量方法中存在的问题,研制了一种基于激光楔形平板剪切干涉测量的便携式激光干涉准直系统.根据剪切干涉测量原理,设计了光学元件的关键参数.在ARM9硬件开发平台下使用嵌入式操作系统WINCE 5.0,通过Embedded C++实现了导轨直线度误差值等的相关算法.系统实时计算相邻信号之间的相位差,简化了激光光束准直度调校测量设备的装调工作;根据信号幅值大小控制信号增益,实现精确检测大尺寸导轨直线度误差的功能.整个系统测量精度高,集成度高,便携性强,可应用于各种工业环境与室外测量.
침대장도궤직선도전통측량방법중존재적문제,연제료일충기우격광설형평판전절간섭측량적편휴식격광간섭준직계통.근거전절간섭측량원리,설계료광학원건적관건삼수.재ARM9경건개발평태하사용감입식조작계통WINCE 5.0,통과Embedded C++실현료도궤직선도오차치등적상관산법.계통실시계산상린신호지간적상위차,간화료격광광속준직도조교측량설비적장조공작;근거신호폭치대소공제신호증익,실현정학검측대척촌도궤직선도오차적공능.정개계통측량정도고,집성도고,편휴성강,가응용우각충공업배경여실외측량.
To deal with the shortage of the traditional linearity measurement of long distance,a portable laser shearing interference alignment system is developed.Key parameters of the measuring elements are designed based on wedge plate shearing interference.Using ARM9 processor as the developing platform of the hardware,the algorithm about linear error valuation of long guide is designed by Embedded C++ under the embedded operating system WINCE 5.0.With the real-time calculation of phase difference between adjacent signal,Laser-beams'collimation calibration and equipments'assembling adjusting are well simplified.The signal gain is adjusted according to the amplitude,the long distance measurement function is realized.The system composed with ARM9 processor has low power dissipation,high accuracy and high integration level.It provides convenience for measurement at industrial environment and outdoors.