CAJ | 학술논문

采用显微拉曼光谱研究了掺氮的类金刚石薄膜,该薄膜分别经过能量密度为300,750和 1500W/mm2氩离子激光的退火处理。分析结果表明氮原子在类金刚石薄膜中形成了C－N键制约了C－H键的形成。由于C－N键的键能比C－H键的键能大得多，因此在激光退火过程中C－N 键不易分解。所以随着氮含量的增加，类金刚石薄膜的激光退火后石墨化程度明显降低，具有比较好的热稳定性。而非掺氮的类金刚石薄膜由于C－H键含量比较高，因此激光退火后容易石墨化。
채용현미랍만광보연구료참담적류금강석박막,해박막분별경과능량밀도위300,750화 1500W/mm2아리자격광적퇴화처리。분석결과표명담원자재류금강석박막중형성료C－N건제 약료C－H건적형성。유우C－N건적건능비C－H건적건능대득다，인차재격광퇴화과정중C－N 건불역분해。소이수착담함량적증가，류금강석박막적격광퇴화후석묵화정도명현강저，구유비교 호적열은정성。이비참담적류금강석박막유우C－H건함량비교고，인차격광퇴화후용역석묵화。
A Micro－Raman spectrometer was used to study nitrogen doped amorphous hydrogenated carbon a－C:H(N) films, annealed by a focused argon ion laser (514.5 nm) operating at power density of 300, 750 and 1500 W/mm2, respectively. During laser annealing, with the increasing of the power density, the peak ratio ID/IG of Raman spectra of an a－C:H film without nitrogen in－ creases and the peak of graphite shifts from 1550 to 1598 cm－1, indicating that the film has graphi－ tized. However, with the increasing nitrogen content in a－C:H(N) films, the graphitization is clearly restrained, indicating that the a－C:H(N) films have higher thermal stability than that of a－C:H films. A laser cold annealing (LCA) mechanism based on the bond excitation energy and thermody－ namics is adopted to interpret the results satisfactorily.