CAJ | 학술논문

介绍了一种压力、温度复合传感器的主要研制加工技术.通过采用灵敏度温度自补偿技术、激光调阻技术、以及薄膜微电路加工工艺等关键技术和手段,在弹性体上制作薄膜应变电阻和薄膜温敏电阻,实现压力、温度双参数测量的功能.同时通过监测温度,可以进一步精确修正压力参数测量的特性方程.
개소료일충압력、온도복합전감기적주요연제가공기술.통과채용령민도온도자보상기술、격광조조기술、이급박막미전로가공공예등관건기술화수단,재탄성체상제작박막응변전조화박막온민전조,실현압력、온도쌍삼수측량적공능.동시통과감측온도,가이진일보정학수정압력삼수측량적특성방정.
In the paper,a main technology of developing and processing compound transducer of pressure and temperature is introduced. In the technology,with thin film strain resistor and temperature sensitive resistor deposited on elastomer,the function of pressure-temperature-two-parameter measurement is achieved,using the technique of sensitivity temperature self-compensating,laser resistor trimming and thin film micro-circuit processing. Meanwhile,by monitoring the temperature,the characteristic equation of measured pressure parameter can be further accurately corrected.