中国光学快报(英文版)
中國光學快報(英文版)
중국광학쾌보(영문판)
CHINESE JOURNAL OF LASERS
2004年
10期
568-570
,共3页
王菲%孙伟%李艾泽%衣茂斌%姜振华%张大明
王菲%孫偉%李艾澤%衣茂斌%薑振華%張大明
왕비%손위%리애택%의무빈%강진화%장대명
In wavelength division multiplexing (WDM) systems, an arrayed waveguide grating (AWG) multiplexer is a key component. A polymeric AWG multiplexer has recently attracted much attention due to its low cost processing and a potential of integration with other devices. Fluorinated poly (ether ether ketone)(FPEEK) is excellent material for fabrication of optical waveguides due to its low absorption loss at 1.55-μm wavelength and high thermal stability. A 32-channel AWG multiplexer has been designed based on the grating diffraction theory and fabricated using newly synthesized FPEEK. During the fabrication process of the Polymer/Si AWG device, spin coating, vaporizing, photolithographic patterning and reactive ion etching (RIE) are used. The AWG multiplexer measurement system is based on a tunable semiconductor laser, infrared camera and a Peltier-type heater. The device exhibits a wavelength channel spacing of 0.8nm and a center wavelength of 1548 nm in the room temperature.
