CAJ | 학술논문

提出了一种用于单频激光干涉仪条纹细分的偏振移相技术.通过偏振分光镜、波片等光学元器件产生四路依次相差90°相位的激光干涉信号,经过硬件电路的整形、放大和比较后,可以解决常见的光强"零漂"问题.共光路设计有效地消除了由于环境因素给测量带来的误差,提高了干涉系统的稳定性和重复性.移相技术不仅充分地利用光能量,而且四路信号更便于干涉条纹的计数和判向,同时为电子细分技术奠定了基础.
제출료일충용우단빈격광간섭의조문세분적편진이상기술.통과편진분광경、파편등광학원기건산생사로의차상차90°상위적격광간섭신호,경과경건전로적정형、방대화비교후,가이해결상견적광강"령표"문제.공광로설계유효지소제료유우배경인소급측량대래적오차,제고료간섭계통적은정성화중복성.이상기술불부충분지이용광능량,이차사로신호경편우간섭조문적계수화판향,동시위전자세분기술전정료기출.
The polarization phase-shifting technology is put forward for the single-frequency laser interferometer fringes subdivision. Four laser interferometer signals which phase-difference followed by 90°can be obtained with the optical components. The "zero drift" problem of the light intensity can be solved by hardware circuit. The common optical path arrangement can effectively remove the error caused by environmental factors and increase the stability and repeatability of the interferometer system. Phase-shifting technology can not only fully use the light intensity, but also the four laser interferometer signals are easy to take count and distinguish the direction of the laser interferometer fringes. And this technology laid the foundation for further electronic subdivision.