CAJ | 학술논문

介绍了一种基于单偏振波导环形谐振腔的新型集成光学陀螺及单偏振环形波导谐振腔的实现方法.其中单偏振光波导由SiO2衬底层、锗掺杂SiO2波导芯层和SiO2上包层组成,整个结构可用硅热氧化技术和PECVD技术生长在硅衬底上.用BPM(束传播法)对设计的单偏振环形谐振腔的传输特性进行仿真分析.结果表明,当入射光波长为1550 nm时,此单偏振波导谐振腔对TM模式传输光的消光比是25 dB/cm,而对TE模式传输光的传输损耗是0.05 dB/cm,谐振腔的精细度可达到35.单偏振波导谐振腔的这些特点适于集成光学陀螺的应用要求,由其研制的集成光学陀螺的分辨率可达到16(°)/h.
개소료일충기우단편진파도배형해진강적신형집성광학타라급단편진배형파도해진강적실현방법.기중단편진광파도유SiO2츤저층、타참잡SiO2파도심층화SiO2상포층조성,정개결구가용규열양화기술화PECVD기술생장재규츤저상.용BPM(속전파법)대설계적단편진배형해진강적전수특성진행방진분석.결과표명,당입사광파장위1550 nm시,차단편진파도해진강대TM모식전수광적소광비시25 dB/cm,이대TE모식전수광적전수손모시0.05 dB/cm,해진강적정세도가체도35.단편진파도해진강적저사특점괄우집성광학타라적응용요구,유기연제적집성광학타라적분변솔가체도16(°)/h.
The integrated optic gyro (IOG) based on the single polarization waveguide (SPW) ring resonator was proposed. A method to realize the SPW ring resonator was presented. The SPW structure contains a Ge-doped silica core layer, a silica buffer layer and silica cladding layers. The whole structure can be grown on a silicon substrate by thermal oxidation of Silicon and PECVD technology. Its propagation characteristics were analyzed and simulated by using the Beam Propagation Method. The SPW ring resonator has a high extinction ratio over 25 dB/cm for TM mode, very low propagation loss of 0.05 dB/cm for the TE mode at 1550 nm wavelength, and a high finesse of 35. These characteristics are very suitable for the applications in IOGs. Arate detection limit of 16 (°)/h can be achieved for the IOG by using the SPW ring resonator.