玻璃
玻璃
파리
GLASS
2012年
2期
43-46
,共4页
刘月豹%汪奇%王成雷%王共志%张红%朱旺根
劉月豹%汪奇%王成雷%王共誌%張紅%硃旺根
류월표%왕기%왕성뢰%왕공지%장홍%주왕근
ITO导电玻璃%真空室%阀板%气密性
ITO導電玻璃%真空室%閥闆%氣密性
ITO도전파리%진공실%벌판%기밀성
ITO conductive glass%vacuum chamber%valve plate%tighteness
通过对ITO镀膜设备气室门阀阀板的结构进行改进，解决了实际生产中真空室密封性能差、阀板使用寿命短、产品质量不稳定等一系列问题。改进要点是在主动、从动阀板上增加设计了冷却水循环水道。
通過對ITO鍍膜設備氣室門閥閥闆的結構進行改進，解決瞭實際生產中真空室密封性能差、閥闆使用壽命短、產品質量不穩定等一繫列問題。改進要點是在主動、從動閥闆上增加設計瞭冷卻水循環水道。
통과대ITO도막설비기실문벌벌판적결구진행개진，해결료실제생산중진공실밀봉성능차、벌판사용수명단、산품질량불은정등일계렬문제。개진요점시재주동、종동벌판상증가설계료냉각수순배수도。
A series of problems, such as poor sealing of vacuum chamber, short service life of valve plate, instable quality of coated product, were overcome by improving the structure of valve plate of air-chamber in the ITO coating equipment. The main improvement is the installation of the circulating water pipe on the active valve and driven valve for cooling purpose.
