CAJ | 학술논문

使用PSD作为大口径光学元件的质量评价标准，为保证检测系统的精度，标定了作为测试系统的大口径相移干涉仪的系统传递函数，并讨论了在对ICF驱动器中所使用的光学元件进行检测时产生的两种主要误差，即：由于放置倾斜导致的低频误差和由干涉条纹引入的高频误差。同时还分析了这些误差在进行计算和分析时可能造成的影响以及消除的方法。
사용PSD작위대구경광학원건적질량평개표준，위보증검측계통적정도，표정료작위측시계통적대구경상이간섭의적계통전체함수，병토론료재대ICF구동기중소사용적광학원건진행검측시산생적량충주요오차，즉：유우방치경사도치적저빈오차화유간섭조문인입적고빈오차。동시환분석료저사오차재진행계산화분석시가능조성적영향이급소제적방법。
In this paper, the power spectral density is employed as the specification criterion of the large aperture optical elements. because it has the functin to describe the fabrication quality of the optical elements in frequency domain. To guarantee the precision of the testing process, the transfer function of the testing system has been confirmed. Furthermore, the main errors appeared in the testing process and their influences have been discussed in detail．The results show that the low frequency error,which caused by the placement,affect the testing result greatly.And the high frequency error,which caused by the interference,does not have more effect on the testing.