CAJ | 학술논문

燃料喷嘴口的微孔在汽车发动机的燃料效率和尾气排放中起关键作用.微孔的几何与表面质量的表征对理解其制造过程及其对喷嘴功能的影响十分重要,然而由于其尺寸小,对这类微孔质量的表征一直是一个难题.本文介绍作者最近进行的用扫描电子显微镜、扫描隧道显微镜、原子力显微镜来表征微孔质量研究的一个实例.虽然大多数计量系统并不是为测量像喷嘴口的微孔这类非平面特征设计的,只要合理选择装置和测头,微孔的高精度多尺度表征是可以实现的.
연료분취구적미공재기차발동궤적연료효솔화미기배방중기관건작용.미공적궤하여표면질량적표정대리해기제조과정급기대분취공능적영향십분중요,연이유우기척촌소,대저류미공질량적표정일직시일개난제.본문개소작자최근진행적용소묘전자현미경、소묘수도현미경、원자력현미경래표정미공질량연구적일개실례.수연대다수계량계통병불시위측량상분취구적미공저류비평면특정설계적,지요합리선택장치화측두,미공적고정도다척도표정시가이실현적.
Fuel injector nozzles with micro-fabricated holes play a critical role in fuel efficiency and emission in automotive engines. Characterization of the geometrical and surface quality of micro-holes is important to understanding the manufacturing process and its impact on the function of the injector. However, due to the small size, it has been difficult to characterize the quality of such micro-holes. In this paper, we present a case study conducted recently for micro-hole quality characterization using scan electron microscope (SEM), scan tunneling microscope (STM), and atom force microscope (AFM). Although most metrology systems are not designed for measuring non-flat features, such as the micro-holes in the nozzle, with appropriate choice of setup and probes, high precision multiple-scale characterization of the micro-holes can be achieved.