半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2005年
12期
2315-2319
,共5页
方达伟%张艺%李晨霞%Manzaneda C%李波
方達偉%張藝%李晨霞%Manzaneda C%李波
방체위%장예%리신하%Manzaneda C%리파
线宽%分布式布拉格反射器%InGaAs-GaAs-AlGaAs半导体激光器
線寬%分佈式佈拉格反射器%InGaAs-GaAs-AlGaAs半導體激光器
선관%분포식포랍격반사기%InGaAs-GaAs-AlGaAs반도체격광기
linewidth%distributed Bragg reflector%InGaAs-GaAs-AlGaAs semiconductor lasers
对DBR几何参量不同的InGaAs-GaAs-AlGaAs DBR半导体激光器样品的输出线宽进行了测量和分析.样品激光器DBR光栅取不同的长度和蚀刻深度以考察其几何特性对耦合系数、反射率以及输出线宽的影响.线宽通过自差频测量系统测量得到.对实验结果与理论计算结果进行了对比.对测得的光学特性参数与几何特性参数之间的联系进行了分析.在此基础上讨论了DBR几何特性对激光器输出线宽的影响.研究结果为该类型DBR半导体激光器的制造提供了有用的信息.
對DBR幾何參量不同的InGaAs-GaAs-AlGaAs DBR半導體激光器樣品的輸齣線寬進行瞭測量和分析.樣品激光器DBR光柵取不同的長度和蝕刻深度以攷察其幾何特性對耦閤繫數、反射率以及輸齣線寬的影響.線寬通過自差頻測量繫統測量得到.對實驗結果與理論計算結果進行瞭對比.對測得的光學特性參數與幾何特性參數之間的聯繫進行瞭分析.在此基礎上討論瞭DBR幾何特性對激光器輸齣線寬的影響.研究結果為該類型DBR半導體激光器的製造提供瞭有用的信息.
대DBR궤하삼량불동적InGaAs-GaAs-AlGaAs DBR반도체격광기양품적수출선관진행료측량화분석.양품격광기DBR광책취불동적장도화식각심도이고찰기궤하특성대우합계수、반사솔이급수출선관적영향.선관통과자차빈측량계통측량득도.대실험결과여이론계산결과진행료대비.대측득적광학특성삼수여궤하특성삼수지간적련계진행료분석.재차기출상토론료DBR궤하특성대격광기수출선관적영향.연구결과위해류형DBR반도체격광기적제조제공료유용적신식.
The linewidths of InGaAs-GaAs-AlGaAs DBR lasers with varied DBR dimensional parameters are measured and analyzed. These lasers were built with different DBR grating lengths and depths in order to explore the effect of the size of the DBR on its coupling coefficient and reflectivity,and hence on the linewidth of the laser diodes. The linewidths were measured by employing a self heterodyne linewidth measurement system. The experimental and calculated data for DBR reflectivity and spectral linewidth are given. The relationship between these data and the dimensions of the DBR is analyzed. Based on this analysis, the effect of the DBR geometry on the linewidth of the lasers is explored. The results give useful information related to the design and fabrication of such DBR lasers.