CAJ | 학술논문

采用超高真空热丝化学气相沉积(HFCVD)系统,以甲烷和氢气为反应气体,在YG13(WC-13%Co)硬质合金基体上沉积金刚石薄膜.采用场发射扫描电子显微镜(FESEM)和X射线衍射仪(XRD)对金刚石薄膜进行检测分析,研究了反应气体的不同进气方式对金刚石薄膜的影响.结果表明,随着进气方式的改变,基体周围气氛的组成、密度和分布受到影响,金刚石薄膜的形核密度、表面形貌、生长织构均有明显的变化,所得金刚石晶粒的生长参数多为1.5<α<3,3~(1/2)/2<г<3~(1/2).
채용초고진공열사화학기상침적(HFCVD)계통,이갑완화경기위반응기체,재YG13(WC-13%Co)경질합금기체상침적금강석박막.채용장발사소묘전자현미경(FESEM)화X사선연사의(XRD)대금강석박막진행검측분석,연구료반응기체적불동진기방식대금강석박막적영향.결과표명,수착진기방식적개변,기체주위기분적조성、밀도화분포수도영향,금강석박막적형핵밀도、표면형모、생장직구균유명현적변화,소득금강석정립적생장삼수다위1.5<α<3,3~(1/2)/2<г<3~(1/2).
The diamond films on a WC-13 % Co substrate are deposited under various intaking methods of reacting gas by hot filament chemical vapor deposition (HFCVD) system. The nucleation density, surface morphologies, crystal structures and film texture are investigated by field emission scanning electron microscopy (FESEM) and X-ray diffractometer (XRD). The results show that, as the gas admission way changed, the composition, distribution and concentration of gas atmosphere were influenced, the nucleation density, surface morphology and growth texture of diamond films also changed correspondingly.