CAJ | 학술논문

通过分子束外延法在经Mg预处理的蓝宝石衬底上制备了ZnO单晶薄膜,利用高分辨透射电镜、电子全息和X射线能谱对该薄膜的结构进行了细致的研究.结果表明,在蓝宝石衬底上预沉积一层很薄的Mg层,可以生长均匀Zn极性的ZnO外延薄膜.ZnO/MgO/蓝宝石的界面非常清晰锐利,同时在界面处可以观察到大约3个原子层的MgO.预沉积的Mg薄层对随后ZnO的极性选择起了关键性作用.
통과분자속외연법재경Mg예처리적람보석츤저상제비료ZnO단정박막,이용고분변투사전경、전자전식화X사선능보대해박막적결구진행료세치적연구.결과표명,재람보석츤저상예침적일층흔박적Mg층,가이생장균균Zn겁성적ZnO외연박막.ZnO/MgO/람보석적계면비상청석예리,동시재계면처가이관찰도대약3개원자층적MgO.예침적적Mg박층대수후ZnO적겁성선택기료관건성작용.
The structure of the ZnO films grown on (0001) sapphire using surface modification of magnesium pre-exposure has been investigated by high resolution transmission electron microscopy, electron holography and X-ray energy dispersive spectroscopy. It is found that pre-deposition of an ultra-thin magnesium film on the sapphire substrate plays a key role in zinc polarity selection and rotation domains elimination of ZnO films. In the resulting sharp interfaces of ZnO/MgO/sapphire, an ordered MgO layer ( ～ 3atomic layers) was observed, which serves as a uniform template for nucleation and growth of a single-domain ZnO film.