CAJ | 학술논문

波导层结构设计是制备太赫兹(THz)量子级联激光器的关键问题之一.本文基于德鲁得(Drude)模型,利用时域有限差分(FDTD)法,对Si/SiGe量子级联激光器的波导层进行优化设计,从理论上对传统的递变折射率波导、单面金属波导、双面金属波导以及金属/金属硅化物波导横磁模(TM模)的模式损耗和光场限制因子进行了对比分析.结果表明,金属/金属硅化物波导不但可以减小波导损耗,而且有很高的光学限制因子,同时其工艺也比双面金属波导容易实现,为Si/SiGe太赫兹量子级联激光器波导层的设计提供了一定的理论指导.
파도층결구설계시제비태혁자(THz)양자급련격광기적관건문제지일.본문기우덕로득(Drude)모형,이용시역유한차분(FDTD)법,대Si/SiGe양자급련격광기적파도층진행우화설계,종이론상대전통적체변절사솔파도、단면금속파도、쌍면금속파도이급금속/금속규화물파도횡자모(TM모)적모식손모화광장한제인자진행료대비분석.결과표명,금속/금속규화물파도불단가이감소파도손모,이차유흔고적광학한제인자,동시기공예야비쌍면금속파도용역실현,위Si/SiGe태혁자양자급련격광기파도층적설계제공료일정적이론지도.
The waveguide design is one of the most important parts in a terahertz quantum cascade laser(QCL). Si/SiGeQCL waveguides, based on the Drude model and finite-difference time-domain (FDTD) method, are designed by the tradi-tional refractive index waveguide structure, the single-sided metal structure, the double-metal clad structure, and a novelmetal/metal silicide structure. The metal/metal silicide structure, showing high modal confinement,is convenient in processengineering and is expected to be a viable waveguide solution for Si/SiGe QCLs in the THz range.