CAJ | 학술논문

制备了一种基于MEMS工艺的定向天线.以异性材料为基底的亚波长谐振腔结构有效降低了天线体积.这种天线可以用于要求高能量密度的微系统的能量传送.本文中的天线厚度为1.5 mm,可工作于10 GHz频段.这使得其易于与微系统集成.文中也给出了仿真及实验的结果,并介绍了天线的加工过程.
제비료일충기우MEMS공예적정향천선.이이성재료위기저적아파장해진강결구유효강저료천선체적.저충천선가이용우요구고능량밀도적미계통적능량전송.본문중적천선후도위1.5 mm,가공작우10 GHz빈단.저사득기역우여미계통집성.문중야급출료방진급실험적결과,병개소료천선적가공과정.
A directional emission antenna was fabricated using MEMS process.Its size was effectively decreased by a sub wavelength resonance cavity.Metamaterial is included as one part of the cavity.The antenna can be used in power transmission of micro system for high power density and small size.The thickness is less than 1.5 mm and work on 10 GHz.This made it easily integrated with micro system.The simulation and experimental results are carried out,and the fabricating process iS also introduced.