CAJ | 학술논문

通过等离子体喷射CVD(chemical vapor deposition)方法生长了光学级金刚石厚膜,运用电火花和机械抛光技术对厚膜进行了双面抛光,并研究抛光表面缺陷对厚膜红外透射率的影响.结果表明:表面的台阶、孔洞、裂纹和沟槽等缺陷均会引起入射红外光波的散射和吸收,从而导致金刚石厚膜透射率的下降.表面的台阶、孔洞、裂纹和沟槽等缺陷厚膜的平均红外透射率分别为46.53%,62.56%,50.11%,58.26%.
통과등리자체분사CVD(chemical vapor deposition)방법생장료광학급금강석후막,운용전화화화궤계포광기술대후막진행료쌍면포광,병연구포광표면결함대후막홍외투사솔적영향.결과표명:표면적태계、공동、렬문화구조등결함균회인기입사홍외광파적산사화흡수,종이도치금강석후막투사솔적하강.표면적태계、공동、렬문화구조등결함후막적평균홍외투사솔분별위46.53%,62.56%,50.11%,58.26%.
The optical-class diamond film was prepared by DC plasma jet CVD (chemical vapor deposition) method, and a double-sided polishing was made by EDM and mechanical polishing technology. The investigations of the polished surface defects on the infrared transmission were tested in detail. The results showed that the surface of the steps, holes, cracks and defects such as groove could cause the incident infrared light scattering and absorption, which lead the infrared transmission rates of thick-film diamond to decline differently. The average infrared transmission rates of level surface, holes, cracks and grooves defects in thick-film were 46.53%, 62.56%, 50.11% , 58.26% respectively.