CAJ | 학술논문

对目前正成为研究热点的微光机电(MOEMS)加速度计的原理和结构特点进行分析,总结了MOEMS加速度计的分类和发展趋势.针对微-纳光栅加速度计,分析了基于干涉效应的微米光栅加速度计和基于亚波长结构有效折射率变化的纳米光栅加速度计的结构和原理,其精度可达ng,并成功应用到地震监测中. 重点分析了基于聚合物的新型光波导加速度计的结构和性能.微环谐振式加速度计测量精度高,性能可“裁剪”,但长期稳定性是制约其应用的主要问题.光力加速度计利用原子进行加速度测量,克服了传统悬臂梁结构长期稳定性差的缺点,具有极高的测量精度.对这几种加速度计的技术特点和主要指标进行比较,并初步探讨了用于惯性领域中的MOEMS加速度计的发展方向和应用前景.
대목전정성위연구열점적미광궤전(MOEMS)가속도계적원리화결구특점진행분석,총결료MOEMS가속도계적분류화발전추세.침대미-납광책가속도계,분석료기우간섭효응적미미광책가속도계화기우아파장결구유효절사솔변화적납미광책가속도계적결구화원리,기정도가체ng,병성공응용도지진감측중. 중점분석료기우취합물적신형광파도가속도계적결구화성능.미배해진식가속도계측량정도고,성능가“재전”,단장기은정성시제약기응용적주요문제.광력가속도계이용원자진행가속도측량,극복료전통현비량결구장기은정성차적결점,구유겁고적측량정도.대저궤충가속도계적기술특점화주요지표진행비교,병초보탐토료용우관성영역중적MOEMS가속도계적발전방향화응용전경.
The principle and structural characteristics of micro-optical electronic mechanical system (MOEMS) accelerometers attracting great attention are analyzed,and the classification and development trend of MOEMS accelerometers are summarized.According to micro-nano grating accelerometers,the principles and structures of micro-grating accelerometers based on interference effect and nano-grating accelerometers based on effective refractive index change for subwavelength structure are analyzed.The results show that the precision of those accelerometers can reach ng order and be applied in seismic monitoring successfully.The structure and performance of new optical waveguide accelerometers based on polymers are analyzed emphatically.The microring resonator accelerometer has the advantages of the high measurement precision and tailored properties,but the long term stability is the primal problem to restrict its application.The acceleration measurement by atoms through the light force accelerometer overcomes the shortcoming of poor long term stability and has a very high precision.The technical features and main indexes of these accelerometers are compared,and the development direction and application prospect of MOEMS accelerometers in the inertial field are also discussed preliminarily.