CAJ | 학술논문

为了研究对称解耦的硅微陀螺仪的性能,对其结构误差进行了分析,并对其系统性能进行了测试.利用全解耦硅微陀螺仪的简化运动模型,分析了由弹性梁梁宽误差导致的机械耦合误差,并推导其公式.利用有限元方法,对机械耦合误差进行了仿真.仿真结果表明,当悬臂梁的加工误差在0～0.4 μm间变化时,机械耦合误差变化范围为0～62.88 °/s;同时仿真结果和计算结果比较显示,机械耦合误差的仿真结果基本与理论公式的计算结果相符,证明理论分析的正确性.对机械耦合误差进行了测试,测试结果表明,全解耦硅微陀螺仪的机械耦合误差仅为 31 °/s,相比课题组前期的半解耦硅微陀螺仪缩小了13.9倍.系统性能实验结果表明,由于机械耦合误差的减小,全解耦硅微陀螺仪的零偏温度系数仅为57.68 °/(h·℃),相比课题组前期的半解耦硅微陀螺仪缩小了9.42倍.
위료연구대칭해우적규미타라의적성능,대기결구오차진행료분석,병대기계통성능진행료측시.이용전해우규미타라의적간화운동모형,분석료유탄성량량관오차도치적궤계우합오차,병추도기공식.이용유한원방법,대궤계우합오차진행료방진.방진결과표명,당현비량적가공오차재0～0.4 μm간변화시,궤계우합오차변화범위위0～62.88 °/s;동시방진결과화계산결과비교현시,궤계우합오차적방진결과기본여이론공식적계산결과상부,증명이론분석적정학성.대궤계우합오차진행료측시,측시결과표명,전해우규미타라의적궤계우합오차부위 31 °/s,상비과제조전기적반해우규미타라의축소료13.9배.계통성능실험결과표명,유우궤계우합오차적감소,전해우규미타라의적령편온도계수부위57.68 °/(h·℃),상비과제조전기적반해우규미타라의축소료9.42배.
In order to study the performance of the symmetrically decoupled silicon micro-gyroscope (DSMG), its structure error was analyzed and the system performance was tested. On basis of the simplified motion model of DSMG, the mechanical coupling error caused by the width error of suspension beams was analyzed and its equation was deduced. Finite element method was used to simulate the mechanical coupling error of DSMG, results of which indicate that, when the width error of suspension beams varies between 0 and 0.4 μm, the variation range of mechanical coupling error is from 0 to 62.88 °/s. Comparison of the simulated values of mechanical coupling error with the theoretical calculation values shows that the simulation results are in agreement with the calculation results, which verifies the correctness of the theoretical analysis of the mechanical coupling error. Test results of DSMG show that the equivalent input rate of mechanical coupling error is only 31°/s, 13.9 times smaller than that of the partially decoupled SMG developed by our research group previously. The system performance experiment results show that, due to the reduction of the mechanical coupling error, the zero bias temperature coefficient of DSMG developed partially decoupled SMG.