CAJ | 학술논문

分析了同步带应用于晶圆传榆机器人机械手的误差产生原因,针对晶圆传输机器人高速高精度的定位要求,建立了含有同步带环节的误差模型.对各误差源进行了显著性分析,并在此基础上提出了结合几何误差迭代法和基于运动学逆解的非线性参数辨识的分步标定方法,对模型进行了误差标定及误差补偿.最后经过仿真分析和实验,有效的证明此方法显著地提高了机械手的末端定位精度.
분석료동보대응용우정원전유궤기인궤계수적오차산생원인,침대정원전수궤기인고속고정도적정위요구,건립료함유동보대배절적오차모형.대각오차원진행료현저성분석,병재차기출상제출료결합궤하오차질대법화기우운동학역해적비선성삼수변식적분보표정방법,대모형진행료오차표정급오차보상.최후경과방진분석화실험,유효적증명차방법현저지제고료궤계수적말단정위정도.
The error causes of the wafer handling robot is analyzed by using timing-belt,and in order to improve positioning precision, the error model including timing-belt is created. On the basis of the pmminency of the error' analyse, it proposed that an error multiple-step calibration and identification method combining parameter error iteration method with calibration method based on inverse kinematics equation. It also identified the geometrical structure error and the compensation. Last, the simulation and experiment results show that the positioning precision is largely improved after the calibration and compensation.