传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2009年
11期
8-11
,共4页
王海涛%林玉池%付鲁华%齐永岳%赵关蓉%宋乐%吴颖
王海濤%林玉池%付魯華%齊永嶽%趙關蓉%宋樂%吳穎
왕해도%림옥지%부로화%제영악%조관용%송악%오영
微小力值%电容变化量%位移变化量
微小力值%電容變化量%位移變化量
미소력치%전용변화량%위이변화량
micro-force value%capacitance change%displacement change
介绍了一种微小力值测量系统的设计方法.系统采用了自主设计的传感器结构,充分利用了圆柱形电容传感器量程大、线性好、边缘效应小等特点,通过高精度直线轴承保证了运动的同轴度,又利用增加屏蔽结构等方法用来消除寄生电容的干扰.检测电路基于新型高精度、集成式电容数字转换器AD7747与单片机,实现了对电容变化量dC的精确测量.实验结果表明:该方法为10~(-5)N以下的微小力值测量提供了一种有效的解决方案.
介紹瞭一種微小力值測量繫統的設計方法.繫統採用瞭自主設計的傳感器結構,充分利用瞭圓柱形電容傳感器量程大、線性好、邊緣效應小等特點,通過高精度直線軸承保證瞭運動的同軸度,又利用增加屏蔽結構等方法用來消除寄生電容的榦擾.檢測電路基于新型高精度、集成式電容數字轉換器AD7747與單片機,實現瞭對電容變化量dC的精確測量.實驗結果錶明:該方法為10~(-5)N以下的微小力值測量提供瞭一種有效的解決方案.
개소료일충미소력치측량계통적설계방법.계통채용료자주설계적전감기결구,충분이용료원주형전용전감기량정대、선성호、변연효응소등특점,통과고정도직선축승보증료운동적동축도,우이용증가병폐결구등방법용래소제기생전용적간우.검측전로기우신형고정도、집성식전용수자전환기AD7747여단편궤,실현료대전용변화량dC적정학측량.실험결과표명:해방법위10~(-5)N이하적미소력치측량제공료일충유효적해결방안.
A design method of measuring system for micro-force value is introduced.Self-designed sensor structure is used to make full use of a cylindrical capacitance sensor range,linear,the edge of the characteristics of small effect and so on,a straight line is used through the high-precision bearings to ensure the movement of coaxial,and other methods of shield capacitance are used to eliminate the interference.Detection circuit through the new high-precision,integrated capacitance-to-digital converter and the AD7747 single-chip processor are used to achieve accurate measurement of dC changes in the volume while reducing the cost of the system.The experiments conclude that the method for the following 10~(-5)N power source and measuring the value provides an effective solution.