真空科学与技术学报
真空科學與技術學報
진공과학여기술학보
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY
2010年
1期
43-49
,共7页
伍继君%戴永年%马文会%杨斌%刘大春%王烨%魏奎先
伍繼君%戴永年%馬文會%楊斌%劉大春%王燁%魏奎先
오계군%대영년%마문회%양빈%류대춘%왕엽%위규선
冶金级硅%太阳能级硅%氧化精炼%硼%综述
冶金級硅%太暘能級硅%氧化精煉%硼%綜述
야금급규%태양능급규%양화정련%붕%종술
Metallurgical grade silicon%Solar grade silicon%Oxidizing refining%Boron%Review
综述了目前冶金级硅氧化精炼制备太阳能级硅的研究进展,详细介绍了熔渣精炼、吹气氧化精炼和热等离子体精炼的方法和装置以及杂质的去除效果.研究发现:上述氧化精炼方法对硅中杂质元素Al、Ca、Cu、B、P等具有很好的去除效果;熔渣和吹气氧化精炼对Fe不明显,须借助于定向凝固方法才能彻底的去除;吹气氧化精炼和等离子体精炼对硅中B的去除效果十分明显,可使其降低至0.1ppmw以下,这为当前冶金法提纯制备太阳能级硅在技术和工艺上提供了很好的思路;通过氧化精炼,硅中杂质元素完全可以达到太阳能级硅的要求.本文提出,吹气氧化精炼(或等离子体精炼)与定向凝固精炼联合使用并形成规模化和连续化精炼装置是加快我国太阳能级硅产业化进程最切实可行的办法和措施.
綜述瞭目前冶金級硅氧化精煉製備太暘能級硅的研究進展,詳細介紹瞭鎔渣精煉、吹氣氧化精煉和熱等離子體精煉的方法和裝置以及雜質的去除效果.研究髮現:上述氧化精煉方法對硅中雜質元素Al、Ca、Cu、B、P等具有很好的去除效果;鎔渣和吹氣氧化精煉對Fe不明顯,鬚藉助于定嚮凝固方法纔能徹底的去除;吹氣氧化精煉和等離子體精煉對硅中B的去除效果十分明顯,可使其降低至0.1ppmw以下,這為噹前冶金法提純製備太暘能級硅在技術和工藝上提供瞭很好的思路;通過氧化精煉,硅中雜質元素完全可以達到太暘能級硅的要求.本文提齣,吹氣氧化精煉(或等離子體精煉)與定嚮凝固精煉聯閤使用併形成規模化和連續化精煉裝置是加快我國太暘能級硅產業化進程最切實可行的辦法和措施.
종술료목전야금급규양화정련제비태양능급규적연구진전,상세개소료용사정련、취기양화정련화열등리자체정련적방법화장치이급잡질적거제효과.연구발현:상술양화정련방법대규중잡질원소Al、Ca、Cu、B、P등구유흔호적거제효과;용사화취기양화정련대Fe불명현,수차조우정향응고방법재능철저적거제;취기양화정련화등리자체정련대규중B적거제효과십분명현,가사기강저지0.1ppmw이하,저위당전야금법제순제비태양능급규재기술화공예상제공료흔호적사로;통과양화정련,규중잡질원소완전가이체도태양능급규적요구.본문제출,취기양화정련(혹등리자체정련)여정향응고정련연합사용병형성규모화화련속화정련장치시가쾌아국태양능급규산업화진정최절실가행적판법화조시.
The latest progress in purifying metallurgical grade silicon into solar grade silicon by oxidation refining was tentatively reviewed in a thought provoking way.The discussions centered on the available equipments and technologies,such as the purification techniques of slagging,gas-blowing and thermal plasma.The strengths and weaknesses of the silicon purification techniques were compared and discussed in detail.Almost all the impurities in the metallurgical grade silicon,including Al,Ca,Cu,B,and P,can be completely eliminated by the above mentioned oxidation refining.Howere,the gas-blowing and slagging techniques fail to get rid of Fe impurities,which can only be removed by directional solidification.The fact that the gas-blowing and thermal plasma refining methods are highly effective in removal of boron,reducing B-impurity to a trace lower than 0.1ppmw,inspires the idea to purifying metallurgical grade silicon.We suggest that the continuous equipment on industrial scale,developed by integrating the gas blowing (or thermal plasma) with directional solidification techniques,may boost production of solar grade silicon.