CAJ | 학술논문

介绍了用于电子束曝光机束斑和柬流测量的高精度电流／电压转换放大器。根据束流极其微弱这一特定情况，为了得到超低漂移、超低噪声和强抗干扰的高精度性能指标要求，采用了对称补偿电路设计方案，合理选用高精度集成电路作为电路的核心器件。为了加强抗干扰能力。对关键技术进行了针对性的有效处理。通过实际工作运行，证明效果良好工作可靠，满足了电子柬曝光机柬斑和束流的高精度测量要求。
개소료용우전자속폭광궤속반화간류측량적고정도전류／전압전환방대기。근거속류겁기미약저일특정정황，위료득도초저표이、초저조성화강항간우적고정도성능지표요구，채용료대칭보상전로설계방안，합리선용고정도집성전로작위전로적핵심기건。위료가강항간우능력。대관건기술진행료침대성적유효처리。통과실제공작운행，증명효과량호공작가고，만족료전자간폭광궤간반화속류적고정도측량요구。
This paper presents the design and development of the high-precision amplifier which is used for the measurement of the electron-beam spot and current. In order to ensure uhralow-drift and uhralow-noise and stubborn aniti-disturbance to achieve ,this amplifier adopts the design scheme of the symmetry compensating circuit .In design of amplifier circuit, high- precision integrate circuits are reasonably used. In accordance with the technical requirement of stubborn aniti-disturbance, some key techniques have been properly handled. Through the test of the performance index and the practical usage, This measurement amplifier is proved to be satisfactory for the measurement amplification of the beam spot and the beam current.