CAJ | 학술논문

根据泊松方程和热扩散方程提出了新型PB-PSOI器件漂移区的二维表面电场分布模型和温度分布模型,模型计算结果与Medici模拟结果相一致.根据所提出的模型,重点研究了埋氧化层厚度及长度对漂移区表面电场分布和温度分布的影响,最后给出了PB-PSOI器件的埋氧化层厚度和长度的优化设计方法.
근거박송방정화열확산방정제출료신형PB-PSOI기건표이구적이유표면전장분포모형화온도분포모형,모형계산결과여Medici모의결과상일치.근거소제출적모형,중점연구료매양화층후도급장도대표이구표면전장분포화온도분포적영향,최후급출료PB-PSOI기건적매양화층후도화장도적우화설계방법.
In this paper, the 2-D analytical models for the surface electrical field and temperature distributions of PB-PSOI devices in terms of Poisson's solution and thermal diffusion solution have been suggested. The analytical results of the presented models show a good agreement with the numerical simulation results obtained by Medici. The dependences of the surface electrical field and temperature on the thickness and the length of the buried oxide have also been discussed in detail. Finally, the methods to optimize the thickness and the length of the buried oxide have been proposed to achieve the high performance of PB-PSOI devices.