CAJ | 학술논문

本文提出一种新型电容式复合介质膜湿敏元件，它的介质膜是将线性输出、温度特性取向不同的两类感湿介质膜(PI，CAB)互补复合而成.对比试验表明，复合介质膜湿敏元件具有优异的线性输出，并对温度系数、重复性和长期稳定性也有明显改善.
본문제출일충신형전용식복합개질막습민원건，타적개질막시장선성수출、온도특성취향불동적량류감습개질막(PI，CAB)호보복합이성.대비시험표명，복합개질막습민원건구유우이적선성수출，병대온도계수、중복성화장기은정성야유명현개선.
A new capacitive humidity sensitive device of the bilayer dielectric film is developed. It is fabricated by using two humidity sensitive dielectric films (CAB.PI) with line output and temperatue specialty on opposite direction as a result, the compensation can be realized. The experiment result illustrates that the capacitive humidity sensitive device of the bilayer dieletric film has good characters of line arity output. Its temperatue coeffeient, repeatability and long term stability are greatly improved.