中国光学快报(英文版)
中國光學快報(英文版)
중국광학쾌보(영문판)
CHINESE JOURNAL OF LASERS
2004年
7期
407-410
,共4页
陆宇灵%程祖海%张耀宁%孙锋%余文峰
陸宇靈%程祖海%張耀寧%孫鋒%餘文峰
륙우령%정조해%장요저%손봉%여문봉
This paper describes a new multi-layer complex liquid-cooled Si mirror with 3 cooling ducts in Archimedes spirals. Utilizing the ANSYS program, the structure of the mirror is optimized and the thermal deformation model of the mirror is simulated. The simulation results show that the mirror has the following advantages:very small amount of surface deformation, uniform distribution of temperature and surface deformation,and fast surface shape restoration. The results of the experiments of thermal deformation and the surface restoration are accurately mapped to the simulation results.