CAJ | 학술논문

利用正弦相位调制的光栅干涉仪测量振动物体的面形,采集振动物体引起相位变化的干涉条纹,经傅里叶变换解调相位,重建振动物体的面形.结果表明正弦相位调制的光栅干涉系统不仅具有较高的测量精度,而且还能测量振动物体的二维面形.
이용정현상위조제적광책간섭의측량진동물체적면형,채집진동물체인기상위변화적간섭조문,경부리협변환해조상위,중건진동물체적면형.결과표명정현상위조제적광책간섭계통불부구유교고적측량정도,이차환능측량진동물체적이유면형.
Movement of a surface profile is measured with a two-grating interferometer using sinusoidal phase-modulation.Interference patterns which are caused by the movement of an object are captured.By computed the phase,the surface profile of an object is recovered.The result shows that this optical system not only is high accurate but also can measure the 2-D surface profile of an object.