CAJ | 학술논문

基于半导体和金属间的相变特性,伴随着温度、电场、压力的变化,具有相关智能特性的VO_2薄膜材料具有较大的应用潜力.本文主要阐述脉冲激光沉积技术在制备金属氧化物方面的物理过程和技术特点,详细介绍脉冲激光沉积制备VO_2薄膜材料的工艺参数和国内外研究进展,并与几种常规制备方法进行对比,给出脉冲激光沉积掺杂对VO_2薄膜材料特性的影响,以及采用脉冲激光沉积制备VO_2纳米材料,讨论了脉冲激光沉积制备具有智能特性的VO_2薄膜材料存在的问题和发展方向.
기우반도체화금속간적상변특성,반수착온도、전장、압력적변화,구유상관지능특성적VO_2박막재료구유교대적응용잠력.본문주요천술맥충격광침적기술재제비금속양화물방면적물리과정화기술특점,상세개소맥충격광침적제비VO_2박막재료적공예삼수화국내외연구진전,병여궤충상규제비방법진행대비,급출맥충격광침적참잡대VO_2박막재료특성적영향,이급채용맥충격광침적제비VO_2납미재료,토론료맥충격광침적제비구유지능특성적VO_2박막재료존재적문제화발전방향.
Based on the characteristics of semiconductor and metal phase transition, with temperature variations, electric or magnetic fields, and pressure variations, vanadium dioxide thin film with smart properties has great potential. Physical processes and technical characteristics of the pulsed laser deposition in the context of the preparation of metal oxide were mainly described, and process parameters and study at home and abroad in the fabrication of vanadium dioxide thin film material were presented, and the contrast among several traditional fabrication methods was provided.The effect of doping by pulsed laser deposition to the properties of vanadium dioxide thin film, and VO_2 nano-material fabricated by pulsed laser deposition were given.The problems and future of fabrication of vanadium dioxide thin film material with smart properties by pusled laser depostion were discussed.