CAJ | 학술논문

从理论上分析静电梳齿微谐振器的机械力学特性,给出了活动梳齿的横向谐振频率解析解.鉴于目前静电微谐振器模拟仿真中存在的问题,提出利用基于MAST语言实现的MEMS宏模块建立微谐振器系统级通用仿真模型,为验证外围电路提供了基础.仿真结果与理论模态分析相一致,验证了模型的有效性.通过谐振频率对结构参数的敏感性分析为优化谐振器性能提供基础,使工作模态远离其他高阶模态;合理安排激励电极,抑制一阶模态扰动.敏感性仿真表明:在横向振动微谐振器中,工作模态谐振频率随梁长的增加而减小;随梁宽的增加而增大;结构层厚度对横向振动频率没有影响;梳齿部分所有参数的变化造成频率的反向变化.
종이론상분석정전소치미해진기적궤계역학특성,급출료활동소치적횡향해진빈솔해석해.감우목전정전미해진기모의방진중존재적문제,제출이용기우MAST어언실현적MEMS굉모괴건립미해진기계통급통용방진모형,위험증외위전로제공료기출.방진결과여이론모태분석상일치,험증료모형적유효성.통과해진빈솔대결구삼수적민감성분석위우화해진기성능제공기출,사공작모태원리기타고계모태;합리안배격려전겁,억제일계모태우동.민감성방진표명:재횡향진동미해진기중,공작모태해진빈솔수량장적증가이감소;수량관적증가이증대;결구층후도대횡향진동빈솔몰유영향;소치부분소유삼수적변화조성빈솔적반향변화.
According to the description of the dynamic of the electrostatic comb micro-resonators, the system level universal parameter model is built. The model is a micro model consisted of some sub-blocks based on MAST langue. It can verify the ability of the peripheral circuit and decrease computational cost obviously. Appropriate parameter value is chosen based on mode analysis and structure sensitivity analysis so that the work resonant frequency can far from the higher order resonant frequency. Making use of symmetry electrode can restrain the lower order perturbation. It is discovered that the work resonant frequency lessen slightly as the length of the DETF beam increasing, but the opposite with the variation of its width and all parameters of the comb. The height of the DETF beam is unrelated to the work resonant frequency.