新型功率混合集成电路材料——氮化铝(AlN)
신형공솔혼합집성전로재료——담화려(AlN)
AlN-A New Material for Power Hybrid Integrated Circuits
  • 万方数据
    微电子技术 미전자기술
    MICRO ELECTRONIC TECHNOLOGY
    2001年 3期 46-49 ,共4页

    毛寒松%王传声%崔嵩

    모한송%왕전성%최숭

    AlN%金属化%功率电路 AlN%金屬化%功率電路
    AlN%금속화%공솔전로
    本文主要介绍了AlN的成瓷工艺，金属化方法、特性及在新型电子元器件中的应用示例，AlN在功率电子领域有望取代BeO，成为本世纪大量应用的主导电子材料。
    본문주요개소료AlN적성자공예，금속화방법、특성급재신형전자원기건중적응용시례，AlN재공솔전자영역유망취대BeO，성위본세기대량응용적주도전자재료。
    AlN Powder sintering process,metallization method and some examples in application to the new electronic components are described in the paper.It has been proven that BeO may be replaced by AIN in power electronic field with great promise,and AIN will become a dominating material in mass application.
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