CAJ | 학술논문

制作了一种新型的基于纳米晶PZT/石英的压电生物质量传感器.采用了溶胶-凝胶法在石英晶体表面制备了纳米晶PZT薄膜,形成PZT/石英结构的敏感单元.研究了纳米晶PZT在石英基体上的微观结构、表面形貌;探讨了纳米晶PZT/石英作为敏感单元在细胞检测中的作用.实验结果表明:PZT薄膜的晶粒大小为20～30 nm,沿(101)晶向择优生长,并且,薄膜表面平整,结构致密.纳米晶PZT/石英结构的敏感单元使生物细胞传感器的灵敏度得到了提高.
제작료일충신형적기우납미정PZT/석영적압전생물질량전감기.채용료용효-응효법재석영정체표면제비료납미정PZT박막,형성PZT/석영결구적민감단원.연구료납미정PZT재석영기체상적미관결구、표면형모;탐토료납미정PZT/석영작위민감단원재세포검측중적작용.실험결과표명:PZT박막적정립대소위20～30 nm,연(101)정향택우생장,병차,박막표면평정,결구치밀.납미정PZT/석영결구적민감단원사생물세포전감기적령민도득도료제고.
A new piezoelectric microbalance biosensor based on nano-crystalline PZT/quarts is fabricated. Sol-gel method is utilized to bond the PZT thin films on the quartz substrate as the sensing unit. The microstructure and the surface appearance of PZT thin films on quartz substrate and the influence of cancer cells detecting with the sensing unit using PZT/quartz are studied. The XRD and AFM results show that the PZT films feature <101> preferred orientation,good automorphic crystal structure,smooth surface,and the crystal particle size is 20 ~30 nm. The sensitivity of biosensor based on nano-crystalline PZT/quartz structure is improved.