CAJ | 학술논문

力平衡式真空微电子加速度传感器的惯性敏感元件不仅受弹性力的作用,同时还受静电力的作用,其总刚度为机械刚度和由静电力引入的电学刚度之和.本文利用平行板电容器模型计算发射电极间的静电力,并引入一个修正系数描述发射锥尖阵列的影响,对传感器性能进行了理论分析.分析表明,提高偏置电压可以改善传感器的线性度和灵敏度,通过调节偏置电压来调整系统的刚度和阻尼比可使其具有更好的动态特性.由于静电吸合效应的影响,质量块的位移必须小于偏置电极间初始间距的1/3,系统才能稳定.为了获得较好的动态特性,需要确定一个由偏置电压决定的优化工作点.实验结果表明,当设置发射电压和反馈偏置电压分别为1.953 V和5.478 V时,该真空加速度传感器的灵敏度达到557 mV/g,非线性度为0.95%,传感器系统具有良好的性能.
력평형식진공미전자가속도전감기적관성민감원건불부수탄성력적작용,동시환수정전력적작용,기총강도위궤계강도화유정전력인입적전학강도지화.본문이용평행판전용기모형계산발사전겁간적정전력,병인입일개수정계수묘술발사추첨진렬적영향,대전감기성능진행료이론분석.분석표명,제고편치전압가이개선전감기적선성도화령민도,통과조절편치전압래조정계통적강도화조니비가사기구유경호적동태특성.유우정전흡합효응적영향,질량괴적위이필수소우편치전겁간초시간거적1/3,계통재능은정.위료획득교호적동태특성,수요학정일개유편치전압결정적우화공작점.실험결과표명,당설치발사전압화반궤편치전압분별위1.953 V화5.478 V시,해진공가속도전감기적령민도체도557 mV/g,비선성도위0.95%,전감기계통구유량호적성능.
The inertia sensitive component of a force-balanced vacuum microelectronic accelerometer is effected by both the elastic force and the electrostatic force,and its total stiffness is the sum of the mechanical stiffness of the beams and the equivalent stiffness produced by the electrostatic force. In considerasion of the effect of emitting tip array, this paper introduces a revised constant αgreater than 1tocompute the actual electrostatic force by using the model of a parallel plate capacitor. The analysis shows that the linearity and sensitivity of the vacuum microelectronic accelerometer has been improved by increasing preload deflection voltages, so the stiffness and damping ratio of the system can be adjusted by modulating the voltage between the two deflection electrodes. Considering the affect by a pull-in, the displacement of proof mass must be less than one-third of the original distance between two deflection electrodes. Moreover,in order to obtain good dynamic characteristics, an optimum working point determined by the preload deflection voltage must be set. The experimental results show that the nonlinearity and sensitivity of the accelerometer are 0.95% and 557 mV/g when the deflection voltage and the emission voltage are 5.478 V and 1.953 V, respectively,which indicates that the sensor has good performance.