仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2009年
z1期
25-27
,共3页
马廷锋%张超%张志甜%王文炎%冯冠平
馬廷鋒%張超%張誌甜%王文炎%馮冠平
마정봉%장초%장지첨%왕문염%풍관평
石英%横向场激励%压电传感器%频率温度特性
石英%橫嚮場激勵%壓電傳感器%頻率溫度特性
석영%횡향장격려%압전전감기%빈솔온도특성
quartz%lateral-field-excitation%piezoelectric sensor%frequency-temperature characteristics
为分析石英晶体横向场激励(lateral-field-excitation, LFE)压电传感器的频率温度特性,文中在厚度场激励(Thick-field-excitation, TFE)压电传感器计算频率温度系数方法基础上,增加一个电场方向的自由度,推导计算LFE压电传感器频率温度系数的公式,并使用该公式计算常用Y旋转切石英晶体横向场激励传感器的一阶、二阶和三阶温度系数,并将其与不考虑压电效应、厚度场激励的2种情况进行比较.通过计算发现,石英晶体在3种不同情况下的频率温度特性曲线基本重合,AT切和BT切石英晶体LFE压电传感器具有零温度系数.
為分析石英晶體橫嚮場激勵(lateral-field-excitation, LFE)壓電傳感器的頻率溫度特性,文中在厚度場激勵(Thick-field-excitation, TFE)壓電傳感器計算頻率溫度繫數方法基礎上,增加一箇電場方嚮的自由度,推導計算LFE壓電傳感器頻率溫度繫數的公式,併使用該公式計算常用Y鏇轉切石英晶體橫嚮場激勵傳感器的一階、二階和三階溫度繫數,併將其與不攷慮壓電效應、厚度場激勵的2種情況進行比較.通過計算髮現,石英晶體在3種不同情況下的頻率溫度特性麯線基本重閤,AT切和BT切石英晶體LFE壓電傳感器具有零溫度繫數.
위분석석영정체횡향장격려(lateral-field-excitation, LFE)압전전감기적빈솔온도특성,문중재후도장격려(Thick-field-excitation, TFE)압전전감기계산빈솔온도계수방법기출상,증가일개전장방향적자유도,추도계산LFE압전전감기빈솔온도계수적공식,병사용해공식계산상용Y선전절석영정체횡향장격려전감기적일계、이계화삼계온도계수,병장기여불고필압전효응、후도장격려적2충정황진행비교.통과계산발현,석영정체재3충불동정황하적빈솔온도특성곡선기본중합,AT절화BT절석영정체LFE압전전감기구유령온도계수.
In order to study the frequency-temperature characteristics of quartz LFE piezoelectric sensors,this paper introduced electric field angle to the frequency-temperature coefficient calculation method of TFE piezoelectric sensors,and deduced the calculation formula of frequency-temperature coefficient for LFE piezoelectric sensors. With this formula, the first, second and third frequency-temperature coefficients of Y rotated cut quartz LFE piezoelectric sensors were calculated, and compared to the coefficients of quartz neglecting piezoelectricity and quartz TFE piezoelectric sensors. The frequency-temperature coefficient curves of quartz LFE piezoelectric sensors in three different conditions are almost uniform. The AT and BT cut quartz LFE piezoelectric sensors also have zero frequency-temperature coefficients.