电子学报
電子學報
전자학보
ACTA ELECTRONICA SINICA
2010年
2期
340-344
,共5页
半导体生产线%层次有色赋时Petri网%遗传算法%建模%优化
半導體生產線%層次有色賦時Petri網%遺傳算法%建模%優化
반도체생산선%층차유색부시Petri망%유전산법%건모%우화
semiconductor wafer fabrication%hierarchical colored timed Petri-Net%genetic algorithm%modeling%optimize
针对半导体生产线调度复杂、难以优化的问题,本文提出一种基于层次有色赋时Petri网技术和遗传算法相结合的优化调度方法.该方法利用层次化的思想结合自顶向下建模方法对半导体生产线进行模块化建模,模型不仅能够反映生产线待加工产品的多条加工路径及其资源约束,还可以对系统的设备维护、各种优先级等特性进行描述,得纠对生产系统更完善更精确的刻画.通过在遗传算法编码中考虑投料策略、工件选设备规则、批加工调度规则和单件加工设备规则等因素得到更加有效的调度方案,提高了模型的优化程度.在此基础上,对实际半导体生产线的不同调度方案分别进行仿真,并对仿真结果进行比较,从而验证了建模方法的正确性及调度策略的有效性.
針對半導體生產線調度複雜、難以優化的問題,本文提齣一種基于層次有色賦時Petri網技術和遺傳算法相結閤的優化調度方法.該方法利用層次化的思想結閤自頂嚮下建模方法對半導體生產線進行模塊化建模,模型不僅能夠反映生產線待加工產品的多條加工路徑及其資源約束,還可以對繫統的設備維護、各種優先級等特性進行描述,得糾對生產繫統更完善更精確的刻畫.通過在遺傳算法編碼中攷慮投料策略、工件選設備規則、批加工調度規則和單件加工設備規則等因素得到更加有效的調度方案,提高瞭模型的優化程度.在此基礎上,對實際半導體生產線的不同調度方案分彆進行倣真,併對倣真結果進行比較,從而驗證瞭建模方法的正確性及調度策略的有效性.
침대반도체생산선조도복잡、난이우화적문제,본문제출일충기우층차유색부시Petri망기술화유전산법상결합적우화조도방법.해방법이용층차화적사상결합자정향하건모방법대반도체생산선진행모괴화건모,모형불부능구반영생산선대가공산품적다조가공로경급기자원약속,환가이대계통적설비유호、각충우선급등특성진행묘술,득규대생산계통경완선경정학적각화.통과재유전산법편마중고필투료책략、공건선설비규칙、비가공조도규칙화단건가공설비규칙등인소득도경가유효적조도방안,제고료모형적우화정도.재차기출상,대실제반도체생산선적불동조도방안분별진행방진,병대방진결과진행비교,종이험증료건모방법적정학성급조도책략적유효성.
As scheduling in semiconductor wafer fabrication is complicated and difficult to optimize, a genetic algorithm (GA) embedded search strategy over a Hierarchical colored timed Petri net (HCIPN) for semiconductor wafer fabrication is pro-posed. All possible behaviors of the semiconductor wafer fabrication systems such as lot routing, resource restrict, equipment mainte-nance,priority of the system can described through the HCTPN model, which is modeled by hierarchical theory and top-view method. The chromosome representation of the search nodes in GA is record the information about the appropriate scheduling policy such as release policy, equipment selecting rule, batching rule and dispatching rule. According to the results, using different schedul-ing strategy to simulate and analyze the performance. The simulation result has proved that the model is efficient and accurate, and the GA scheduler is validity.