CAJ | 학술논문

介绍了该高温绝压传感器的原理和特点,设计了传感器关键元件弹性膜片结构,制定了一套弹性膜片的制作工艺,使弹性膜片的加工工艺、热处理工艺有机地结合起来,弹性膜片金相组织和力学性能达到理想状态,解决了该传感器精度的关键技术,研制出一体化传感器在(-50～220)℃工作温度范围精度达到0.6%F·S.
개소료해고온절압전감기적원리화특점,설계료전감기관건원건탄성막편결구,제정료일투탄성막편적제작공예,사탄성막편적가공공예、열처리공예유궤지결합기래,탄성막편금상조직화역학성능체도이상상태,해결료해전감기정도적관건기술,연제출일체화전감기재(-50～220)℃공작온도범위정도체도0.6%F·S.
The principle and characteristics of high - temperature absolute pressure sensor are introduced. Structure of flexible diaphragm in key components of senser are designed. A set of processes are made for flexible diaphragm. So that elastic membrance process and heat treatment process have been combined organically, and desired state of elastic membrance microstructure and mechanical property have been achieved. Key technologies for measurement accuracy has been solved. Integrated sensor which accuracy is 0. 6% F · S has been manufactured on ( - 50 ~ 220)℃ operation temperature range.